Overview

A programmable process furnace for annealing in nitrogen atmosphere. Furnace's memory can restore 10 different programs and each of them can have 25 steps. Maximum temperature in program is 999 °C and maximum temperature rice (slew rate) is ±100 °C/min.

The furnace have one tube for 100 mm wafers but wafer pieces can be also annealed. The furnace is used for metal sintering and other more exotic processes that can not be done in other cleanroom furnaces.