| Technical data | |
| Wafer size | 4" (only) |
| Mask size | 5" square |
| UV lamp output | 500 watts |
| Wavelength | 425 nm |
| Illumination uniformity | 5% |
| Fine align range | ± 0.25 µ X and Y |
| Wafer handling | manual, semimanual, automatic |
| Technical data | |
| Wafer size | 4" (only) |
| Mask size | 5" square |
| UV lamp output | 500 watts |
| Wavelength | 425 nm |
| Illumination uniformity | 5% |
| Fine align range | ± 0.25 µ X and Y |
| Wafer handling | manual, semimanual, automatic |