In the probe station you can perform DC measurement like CV and IV. All measurement units can be controlled by ICS-software.

HP4145A and HP4155A semiconductor parameter analyzer

There are four stimulus/measurement (SMUs) channels, two voltage sources (VS) channel and two voltage monitors (Vm) channel in both equipment. The maximum output voltage of SMUs is ±100 and the current is limited so that power has maximum of 2 W. In HP4155 the voltage can be set with resolution of 100 µV and measured with resolution of 2 µV. The current can be set with resolution of 100 fA and measured with resolution of 10 fA.

HP4192A LF impedance analyzer

The measurement frequency range is 5 Hz-13 MHz. The amplitude-phase measurements of two-port system and the impedance measurements can be done. In impedance measurement the built-in DC bias voltage can be set ±35 V with resolution of 10 mV.