The Axiospeed FT system (produced by Zeiss/Opton, Germany) applies method of spectral analysis in reflected light to measure transparent layers on silicon with high speed and automatically.

Technical information

Thickness range	50 nm - 5 µm
Accuracy of thickness measurements	< 2.5 %
Time of measurement	0.5 s/point
Spectrum range	380 - 750 nm
Analyzed layer number	up to 3