Helsinki University of Technology


MICRONOVA is the leading research centre for micro- and nanotechnology in Finland, containing research groups from the Helsinki University of Technology (TKK) and Technical Research Centre of Finland (VTT). VTT and TKK share a common state-of-the-art infrastructure, which allows scientists at MICRONOVA to concentrate fully on their research. MICRONOVA's modern facilities were completed in 2002 and include 2600m2 of cleanrooms, processing lines for silicon BiCMOS, MEMS, III-V optoelectronics and thin film processing, in addition to extensive laboratories for electrical and optical measurements and various types of materials characterisation. MICRONOVA combines VTT's traditional strengths in industrial contract research and TKK's emphasis on advanced basic research. The central research focus includes micro-, nano-, and optoelectronic devices, materials, systems and fabrication techniques and how to join these with information technology and biosciences applications. Hundreds of researchers work in MICRONOVA, of these about 300 in the clean room building. Several national top research units and research schools are also operating in the community.

In addition to the work with VTT, TKK's research groups have extensive co-operation with universities, research institutes and companies both inside and outside Finland. Main part of the funding for the facilities is provided by the Ministry of Education, both directly and through the normal University budget. Support for research comes mainly from the Academy of Finland, the National Technology Agency of Finland (Tekes), international research programmes and industry. The main research areas at TKK MICRONOVA include:

Teaching is an integral and important part of TKK MICRONOVA's activities. Courses in micro- and semiconductor technology, nanotechnology and optoelectronics are offered for both undergraduate and graduate students. In addition, semiconductor processing is taught in the clean rooms at MICRONOVA.

MICRONOVA is also a technology park with several companies and research units working there:

Ajat Oy X-ray imaging systems
Lumilaser Oy Epitaxial compound semiconductor structures
Nilas Oy Masks for photolithography
OptoGaN Oy GaN for light emitters
Picosun Atomic Layer Deposition tools for nanotechnology
Silecs Oy Dielectric materials for microelectronics
Vaisala Oy Meteorological and environmental measurement systems

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