Major equipment

Lithography

• Mask aligner Electronic Visions AL6-2 (double sided)

• Mask aligner LOMO

• Mask aligner Suss MJB3

• Spinner BLE20

• Ovens/hotplates

• LEO Supra 40 SEM e-beam lithography system

Oxidation and diffusion

• Horizontal furnace Centrotherm (3 tubes)

• Horizontal furnace Thermco (4 tubes)

Ion implantation

• NV-3206 ion implantation system

Annealing

• Minifurnace ATV PEO 601

• Minifurnace Minibrute

• RTA Foton-6

• Annealing tubes also available in the Centrotherm and Thermco furnaces

Thin Film Deposition

• TFS 500 ALD

• Horizontal LPCVD nitride Centrotherm

• PECVD (Oxford 80+)

• Sputter (Oxford 400)

• Thermal evaporators

Etching

• RIE (Oxford 80+)

• RIE Alcatel MCM 220B Autoetcher FOR SALE!

• ICP-RIE

• Wet etching benches Stangl

  • BHF
  • Al-etch
  • TMAH

Wet processing

• cleaning baths

• etching baths

• photoresist stripping

• electroplating

• electrochemical etching

• PDMS casting

• sublimation

Epitaxy

• MOVPE Thomas Swan CCS

• MBE system

Bonding

• Anodic bonder

Backend

• Dicing saw Loadpoint Microace 3

• Probe station

Test and measurement

• SEM

• Profilometer

• Reflectometer

• Ellipsometer

• Digiscope

• WT-85X 400 Lifetime Scanner

• DLS-83D Deep Level Spectrometer (DLTS)

• Hall-measurement system